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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
フォーマット:
雑誌
言語:
英語
出版情報:
New York : American Institute of Physics, 1991-
形態:
v. ; 29 cm
巻次(年次):
Vol. 9, no. 1 (Jan./Feb. 1991)-
継続前誌:
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <AA10635106>
書誌ID:
AA10804928
ISSN:
21662746  CiNii Articles  Webcat Plus  JAIRO
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